METHOD FOR PRODUCING NOZZLE SUBSTRATE, METHOD FOR PRODUCING DROPLET-DISCHARGING HEAD, HEAD FOR DISCHARGING DROPLETS, AND APPARATUS FOR DISCHARGING DROPLETS

摘要

The purpose of the present invention is one that has firmly adhered to damage the substrate and the supporting substrate during processing of the substrate no, and can be easily peeled off from the substrate to the support substrate, and when cracks have formed in the substrate, also by far not reached the head of the cracks, it is easy to handle, the production rate of the product or raw material for to provide a method for producing a nozzle substrate to help improve. ; to be processed the substrate 100, a nozzle hole 11 which is formed by the recess etching process is a process, the recesses for joining the first support substrate 61 to the surface of the machining side is formed process, the first thinned from the supporting substrate side and the opposite side was bonded to the substrate to be processed to the desired thickness of the concave portion which is open to the front end processing step, the second support substrate to the concave portion of the opening-side surface of the opening 62, the bonding process, and peeling the first support substrate from the substrate to be processed, a step of peeling off the foil for bonding the third supporting substrate to the top and bottom faces process, the second support substrate from the substrate to be processed.