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Method of fabricating nanochannels and nanochannels thus fabricated
Method of fabricating nanochannels and nanochannels thus fabricated
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机译:制备纳米通道的方法和由此制备的纳米通道
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摘要
A method of fabricating at least one nanochannel in a semiconductor material applied on a substrate, comprising the semiconductor material being subjected to an etching treatment and the substrate to a bonding treatment so as to attach a covering layer to the substrate, in which bonding treatment the semiconductor material is applied as bonding agent, and wherein prior to etching, the semiconductor material is locally doped for the formation of electrodes.
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