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Diamond triode devices with a diamond microtip emitter
Diamond triode devices with a diamond microtip emitter
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机译:带有金刚石微尖端发射器的金刚石三极管器件
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摘要
Diamond microtip field emitters are used in triode vacuum microelectronic devices, sensors and displays. Diamond triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.
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