Vacuum handler systems and processes for flexible automation of semiconductor fabrication

摘要

Apparatus and methods useful for flexible factory automation of semiconductor vacuum systems are presented, including a load lock accessible by robotic means located in a substrate handler connected to and positioned between the load lock and a vacuum process chamber. The substrate handler has a substrate storage position and a substrate active position, wherein the substrate handler is adapted to be isolated from the load lock when the load lock is pumped down, and a single vacuum pump is used to service both the load lock and the substrate handler.