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Process and apparatus for generating a strong phase shift optical pattern for use in an optical direct write lithography process
Process and apparatus for generating a strong phase shift optical pattern for use in an optical direct write lithography process
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机译:产生用于光学直接写入光刻工艺中的强相移光学图案的方法和设备
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摘要
The present invention provides methods and apparatus for accomplishing a strong phase shift direct write lithography process using reconfigurable optical mirrors. A maskless lithography system is provided. The maskless direct-write lithography system provided uses an array of mirrors configured to operate in a tilting mode, a piston-displacement mode, or both in combination. The controlled mirror array is used to generate strong phase shift optical patterns which are directed onto a photoimageable layer of a substrate in order to facilitate pattern transfer. In order to avoid constraining the system to forming edges of patterns aligned with the array of mirrors, gray-scale techniques are used for subpixel feature placement.
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