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Fast Si diodes and arrays with high quantum efficiency built on dielectrically isolated wafers
Fast Si diodes and arrays with high quantum efficiency built on dielectrically isolated wafers
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机译:基于介电隔离晶片的具有高量子效率的快速Si二极管和阵列
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摘要
Fast silicon diodes and arrays with high quantum efficiency built on dielectrically isolated wafers. A waveguide is formed in the top surface of the silicon that utilizes total internal reflection from the Si—Si Oxide interface to form an internal mirror. This mirror reflects incoming light into the waveguide cavity, with the light being trapped there by surrounding reflective interfaces. A masking layer may be used to define an input window. Individual diodes or linear arrays may be formed as desired. Some alternate embodiments are described.
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