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Strained semiconductor-on-insulator structures and methods for making strained semiconductor-on-insulator structures

机译:应变绝缘体上半导体结构以及制造应变绝缘体上半导体结构的方法

摘要

The present invention relates to semiconductor-on-insulator structures having strained semiconductor layers. According to one embodiment of the invention, a semiconductor-on-insulator structure has a first layer including a semiconductor material, attached to a second layer including a glass or glass-ceramic, with the CTEs of the semiconductor and glass or glass-ceramic selected such that the first layer is under tensile strain. The present invention also relates to methods for making strained semiconductor-on-insulator layers.
机译:具有应变半导体层的绝缘体上半导体结构技术领域本发明涉及具有应变半导体层的绝缘体上半导体结构。根据本发明的一个实施例,绝缘体上半导体结构具有包括半导体材料的第一层,该第一层附接到包括玻璃或玻璃陶瓷的第二层上,并且选择了半导体和玻璃或玻璃陶瓷的CTE。使第一层处于拉伸应变下。本发明还涉及制造应变绝缘体上半导体层的方法。

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