Lithographic apparatus and device manufacturing method utilizing plural patterning devices

摘要

A lithographic apparatus includes an illumination system, a patterning system, a projection system, and a combining system. The illumination system supplies a beam of radiation. The patterning system patterns the beam. The patterning system includes at least two arrays of individually controllable elements arranged to be illuminated by respective portions of the beam, each of the arrays pattering the respective portion of the beam. The combining system combines the patterned portions into the patterned beam. The projection system projects the patterned beam onto a target portion of a substrate.