首页>
外国专利>
Fourier Transform spectrometer apparatus using multi-element MEMS
Fourier Transform spectrometer apparatus using multi-element MEMS
展开▼
机译:使用多元素MEMS的傅立叶变换光谱仪设备
展开▼
页面导航
摘要
著录项
相似文献
摘要
A Fourier Transform (FT) spectrometer apparatus uses multi-element MEMS (Micro-Electro-Mechanical-Systems) or D-MEMS (Diffractive Micro-Electro-Mechanical-Systems) devices. A polychromatic light source is first diffracted or refracted by a dispersive component such as a grating or prism. The dispersed beam is intersected by a multi-element MEMS apparatus. The MEMS apparatus encodes each spectral component thereof with different time varying modulation through corresponding MEMS element. The light radiation is then spectrally recombined as a single beam. The beam is further split into to a reference beam and a probe beam. The probe light is directed to a sample and then the transmitted or reflected light is collected. Both the reference beam and probe beam are detected by a photo-detector. The detected time varying signal is analyzed by Fourier transformation to resolve the spectral components of the sample under measurement.
展开▼