机译:新型微傅里叶变换光谱仪
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, CHN;
Graduate School of the Chinese Academy of Sciences, Beijing 100039, CHN;
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, CHN;
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, CHN;
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, CHN;
Graduate School of the Chinese Academy of Sciences, Beijing 100039, CHN;
Department of Optoelectric Engineering, Jinan University, Guangzhou 510632, CHN;
fourier transform spectrometer(FTS); actuator; miniaturization; michelson interferometer; stepped mirror;