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Silicon-based resonant cavity photodiode for image sensors
Silicon-based resonant cavity photodiode for image sensors
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机译:用于图像传感器的硅基谐振腔光电二极管
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摘要
An imager with pixels having a resonant-cavity photodiode. The resonant cavity photodiode increases absorption of light having long wavelengths. A trench is formed for the photodiode and reflective film is grown on the bottom of the trench. The reflective film reflects light that is not initially absorbed back to the active region of the photodiode.
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