首页>
外国专利>
Multiple microelectromechanical (MEM) devices formed on a single substrate and sealed at different pressures and method therefor
Multiple microelectromechanical (MEM) devices formed on a single substrate and sealed at different pressures and method therefor
展开▼
机译:在单个基板上形成并在不同压力下密封的多个微机电装置及其方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Methods and apparatus are provided forming a plurality of semiconductor devices on a single substrate, and sealing two or more of the devices at different pressures. First and second semiconductor devices, each having a cavity formed therein, are formed on the same substrate. The cavity in the first device is sealed at a first pressure, and the cavity in the second device is sealed at a second pressure.
展开▼