Focusing servo device and focusing servo method

摘要

A focal detecting means (35) of a controller (25) controls an actuator driver (38) to actuate an actuator (12) to vibrate an objective lens (3) in a direction along an optical axis. An output of a focus error signal from a signal generator (27) is checked by a signal detecting means (46) and presence of a workpiece is determined when the signal is detected. When the presence of the workpiece is detected, the focal detecting means (35) moves the objective lens (3) along the optical axis by the actuator (12) and a focus position is recognized with reference to a position signal from a position detecting means (49) together with the focus error signal, where the objective lens (3) is moved to the focus position for focusing.