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High speed photodiode with a barrier layer for blocking or eliminating slow photonic carriers and method for forming same
High speed photodiode with a barrier layer for blocking or eliminating slow photonic carriers and method for forming same
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机译:具有用于阻挡或消除慢速光子载流子的阻挡层的高速光电二极管及其形成方法
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摘要
A structure (and method for forming the structure) includes a photodetector, a substrate formed under the photodetector, and a barrier layer formed over the substrate. The buried barrier layer preferably includes a single or dual p-n junction, or a bubble layer for blocking or eliminating the slow photon-generated carriers in the region where the drift field is low.
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