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Method for forming thin-film, apparatus for forming thin-film, method for manufacturing semiconductor device, electro-optical unit, and electronic apparatus
Method for forming thin-film, apparatus for forming thin-film, method for manufacturing semiconductor device, electro-optical unit, and electronic apparatus
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机译:薄膜的形成方法,薄膜的形成装置,半导体装置的制造方法,电光单元及电子设备
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摘要
The invention provides a method of forming a high-performance thin-film at low cost using a liquid material in safety, an apparatus to form a thin-film, a method of manufacturing a semiconductor device, an electro-optical unit, and an electronic apparatus.;An apparatus to form a thin-film includes a coating unit to apply a liquid material containing a thin-film component onto a substrate and also includes heat-treating units to heat the substrate applied with the liquid material. The coating unit and the heat-treating units each include a control device to control the atmosphere in a treating chamber to treat the substrate.
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