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Non-destructive evaluation of damage below the surface in optical elements.
Non-destructive evaluation of damage below the surface in optical elements.
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机译:对光学元件表面以下的损伤进行非破坏性评估。
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摘要
A non-destructive process for evaluating subsurface damage in an optical element focuses a microscope at points within the optical element and measures the intensity of reflected light. In one embodiment, a microscope focus a laser beam at a measurement point with the optical element and also collects reflected or scattered light from damage in the optical element. Analysis of data indicating the reflected intensities for a three-dimensional array of points within the optical element can determine the location and severity of the subsurface damage.
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