Probe repair method, especially for scanning probe microscopy, comprises removing or adding material using focused ion beam technology

摘要

The method comprises removing some of the probe material. This removal comprises the use of Focused Ion Beam (FIB) technology to make a cut through at least part of the probe (1'). Independent claims are also included for a probe repair method in which material is added to the damaged or worn probe and for a method for extending the life of a probe by adding material. The addition of material is carried out using FIB technology.