PROCESS FOR ALLOYING SEMICONDUCTORS BY USE OF RECOIL ATOMS FROM METAL FILMS IN EXTERNAL ELECTRIC FIELD

摘要

A process for alloying semiconductors by use of recoil atoms from metal films in external electric field in the process of radiation of system metal-semiconductor by beam of accelerated ions with influence of voltage pulse on the system. Value and direction of external electric field in the process of alloying are modified, at that profile of recoil atoms concentration in semiconductor is purposely modified.