METHOD FOR DETERMINING OPTICAL PARAMETERS OF THIN-FILM MATERIAL BY OPTICAL REFRACTION SPECTROSCOPY

摘要

The proposed method for determining optical parameters of thin-film material by optical refraction spectroscopy consists in measuring the thickness of the film, determining the refractive indices and the absorption factors for the film and the substrate at a specified optical radiation wavelength, and determining the transmission spectra for the film and the substrate. The data obtained are used to determine the dispersion of the refractive index and the dispersion of the absorption factor for the material. The proposed method is distinctive byits enhanced accuracy.