MULTI-PORT MONOLITHIC RF MEMS SWITCHES AND SWITCH MATRICES

摘要

A multi-port RF MEMS switch, a switch matrix having several multi-port RF MEMSswitchesand an interconnect network have a monolithic structure with clamped-clampedbeams,cantilever beams or thermally operated actuators. A method of fabricating amonolithic switchhas clamped-clamped beams or cantilever beams.