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MULTIPLE SHADOW MASK STRUCTURE FOR DEPOSITION SHADOW MASK PROTECTION AND METHOD OF MAKING AND USING SAME
MULTIPLE SHADOW MASK STRUCTURE FOR DEPOSITION SHADOW MASK PROTECTION AND METHOD OF MAKING AND USING SAME
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机译:用于沉积阴影掩模保护的多重阴影掩模结构及其制造和使用方法
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摘要
The present invention is a multi-layer shadow mask and method of use thereof. The multi-layer shadow mask includes a sacrificial mask bonded to a deposition mask. The sacrificial mask provides protection against an accumulation of evaporant on the deposition mask which would cause the deposition mask to deform.
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