Micromechanical contact arrangement and microrelay having the same

摘要

The micro-electromechanical (MEMS) contact and micro-relay (1) may be used for switching electric and electronic equipment on and off. It has a flexible membrane (12) held at its edges. It is moved by drive actuators (4) between contact (B) and non-contact (A) positions. The membrane may carry a flexible contact region (11) on one side, which may touch fixed contacts (2,3).