METHOD FOR PRODUCING A TEST STRUCTURE IN ORDER TO TEST FLEXIBILITY OF A MEMBRANE OF A MICROMECHANICAL COMPONENT AND CORRESPONDING EXAMINATION STRUCTURE

摘要

The invention relates to a test structure for testing flexibility of a membrane (3) of a micromechanical component (10), comprising a plurality of discrete test patterns (T1-T4). Said test patterns (T1-T4) are resolved in a structurally different manner by a developing process so that the structural resolution of a respective test pattern (T1-T4) represents a measurement for the flexibility of the membrane (3) in the position of a respective test pattern (T1-T4), and to a corresponding production method. The invention also relates to an test structure for testing the flexibility of a membrane (3) of a micromechanical component (10), said test structure comprising a continuous test structure (T5), whereby the test pattern (T1-T4) is resolved in a structurally continuous manner by a developing process so that the structural resolution of the test pattern (T5) in a respective position of the pest pattern (T5) represents a measurement of the flexibility of the membrane (3) in the respective position of the test pattern (T5), in addition to a corresponding method.