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Silica glass crucible with bubble-free inner wall and reduced bubble growth wall

机译:石英玻璃坩埚,内壁无气泡,壁面气泡减少

摘要

A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.
机译:石英玻璃坩埚包括稳定的,无气泡的内层和不透明的外层,这两层都表明在切克劳斯基工艺过程中气泡的减少。当用于CZ工艺时,在坩埚壁中观察到很小的体积变化,并且坩埚对熔体液位几乎没有影响。本发明的坩埚特别适用于晶体缺陷减少的缓慢硅锭提拉。本发明的熔融方法控制了熔融前沿的动态气体平衡,在熔融前沿将形成的晶粒熔融成致密的熔融二氧化硅。

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