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Silica glass crucible equipped with a bubble-free and reduced bubble growth wall

机译:石英玻璃坩埚,配有无气泡且气泡减少的壁

摘要

PROBLEM TO BE SOLVED: To provide a crucible, wherein a volume change is hardly observed in the crucible wall, and the crucible undergoes little influence on the melt level and is especially suited for slow silicon ingot pulling with reduced crystalline defects when used in a Czochralski process.;SOLUTION: The silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer. Both layers exhibit a reduced bubble growth during the Czochralski process. The fusion process of the invention controls the dynamic gas balance at the fusion front where a formed grain is molten to dense molten silica.;COPYRIGHT: (C)2007,JPO&INPIT
机译:解决的问题:提供一种坩埚,其中在坩埚壁上几乎没有观察到体积变化,并且该坩埚对熔体液位几乎没有影响,并且特别适合用于缓慢的硅锭提拉,当用于切克劳斯基(Czochralski)时解决方案:解决方案:石英玻璃坩埚包括稳定的无气泡内层和不透明的外层。在切克劳斯基过程中,这两层都显示出减少的气泡生长。本发明的熔融方法控制了熔融前沿的动态气体平衡,在熔融前沿,形成的晶粒被熔融成致密的熔融二氧化硅。;版权所有:(C)2007,JPO&INPIT

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