MMIC ELECTROMAGNETIC NOISE FILTER AND MICROWAVE INTEGRATED CIRCUIT DEVICE INCLUING THE SAME

摘要

An MMIC(Monolithic Microwave Integrated Circuit) type electromagnetic noise filter structure and an RF IC device with the same are provided to minimize the volume and complexity of circuitry and to improve a noise removing efficiency by manufacturing nonlinear semiconductor elements and a noise filter as one piece. A dielectric thin film(42) is formed on an upper surface of a semiconductor substrate(41). A coplanar signal line(43) is formed on the dielectric thin film. Both end portions of the coplanar signal line are connected with input/output portions. First and second coplanar ground lines(44a,44b) are formed at both sides of the coplanar signal line on the dielectric thin film.