ANALYZING CHAMBER INCLUDING A LEAKAGE ION BEAM DETECTOR AND MASS ANALYZER INCLUDING THE SAME

摘要

Mass-spectrometry, which is appointed, can detecte the room for disclosing Electrolyte Leakage Rate. The quality analysis for appointing room includes a main body, has an internal passage of the ion beam between entrance therethrough, outlet that wherein ion beam is issued and be the entrance of ion beam be incident. The inner wall that shield portion is arranged along the main body in the corridor of the inside from the ion beam qualification of the inside by main body within the sidewall sections prevents from being damaged. Shielding section and by detector be able to detect ion beam reach inner wall be located between the inner wall of main body from the leakage sensing ion beam from shield portion. Therefore, the inner wall of the main body of the leakage from ion beam from the shielded segment by abrasion can be prevented from being damaged.