ANALYZING CHAMBER INCLUDING A LEAKAGE ION BEAM DETECTOR AND MASS ANALYZER INCLUDING THE SAME

摘要

The mass spectrometry appointed chamber that can detect ion leakage is disclosed. The mass analysis appointed chamber comprises a body having an internal passage through which the ion beam is between the inlet, outlet to which the ion beam is emitted and the inlet and outlet to be the ion beam is incident. Shielding portion is arranged to prevent along the inner wall of the main body which defines the internal passageway within said sidewall from the ion beam passing through the inside of the main body is damaged. The shielding section and the by the detector capable of detecting the ion beam to reach the inner wall positioned between the inner wall of the main body to sense the ion beam from leaking from the shielding portion. Accordingly, the inner wall of the main body from leaking from the ion beam by the shielding parts of the wear can be prevented from being damaged.