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Analyzing chamber including a leakage ion beam detector and mass analyzer including the same
Analyzing chamber including a leakage ion beam detector and mass analyzer including the same
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机译:具有泄漏离子束检测器的分析室和包括该泄漏室的质量分析仪
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摘要
In an analyzing chamber for a mass analyzer, a body of the analyzing chamber may include an inlet through which an ion beam enters and an outlet through which the ion beam leaves. A shielding section may be installed on a sidewall. The shielding section may prevent the ion beam traveling along a path in the body from causing damage to the sidewall of the body. A detector may be interposed between the sidewall of the body and the shielding section. The detector may detect an ion beam leaking through the shielding section. Accordingly, damage to the sidewall of the body may be sufficiently reduced and/or prevented.
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