PLASMA GENERATOR FOR PREPROCESSING IN PARYLENE COATING

摘要

The present invention relates to a plasma generating device, can be accommodated in particular the base material between the electrodes in the vacuum chamber thereby detachably installed in the housing base plate and communicates with the vacuum pump where the inner wall of the vacuum chamber in a number of, in the base material parallel to the base metal surface prior to the coating lean efficient cleaning, parallel to modification to improve the adhesion to the polymer film coating Lin A plasma generating apparatus for pre-processing ; The present invention with a gap in a vacuum chamber provided with a door installed up and down alternately, and the negative electrode and a positive electrode that is a high frequency; The base plate and the housing is formed such that a plurality of slits provided between the negative electrode and the positive electrode and the base material can be stored; Gas tank for supplying the reaction gas through the gas injection orifice that extends into the vacuum chamber; And a vacuum pump for adjusting the pressure in the vacuum chamber through a discharge pipe provided in one side wall of the vacuum chamber; Is composed of.