Ultrafast laser microprocessing system and method based on spectral expansion

摘要

An ultrafast laser microprocessing system and a method based on spectral expansion are provided to obtain a high processing speed by expanding a processing area per unit time. In an ultrafast laser microprocessing system, a femto second laser generator(11) generates a beam having a femto second pulse. A spectrum device(13) spreads a spectrum of the beam generated from the femto second laser generator(11) in a space. An optical device(15) focuses the spectrum spread by the spectrum device(13) on a target work piece. A process device(17) processes the target work piece focused by the optical device(17).