BARIUM TITANATE THIN FILMS WITH TITANIUM PARTIALLY SUBSTITUTED BY ZIRCONIUM, TIN OR HAFNIUM

摘要

Disclosed are high permittivity (dielectric constant), thin film CSD barium titanate based dielectric compositions that have titanium partially substituted by zirconium, tin or hafnium. The compositions show capacitance as a function of temperature that better satisfies the X7R requirements.