RAPID MEASUREMENT METHOD OF NANO-SCALE THICKNESS OF THIN FILM USING WHITE X-RAY REFLECTIVITY AND SYSTEM THEREOF

摘要

The invention nanoscale using white X-ray reflectance method using a detector with a white X-ray energy resolution the measurement of the film thickness at a high speed. More specifically, the method which can be irradiated on a thin film of a white X-ray, which includes a continuous wave with a certain angle and determine the thickness of the thin film in a short period of time by monitoring the wavelength at the same time by using the X-ray detector having an energy resolution which is reflected from a thin film a. The present invention can be by using the existing monochrome X-ray detectors and general sikimyeo change the irradiation angle of X-ray films for the X-ray reflectance measurement to be the biggest disadvantage of the method of obtaining the measured time shorter than ten times the thickness of the thin film. The method for the thickness of the thin film of different situations and changes in the thickness of the thin film was rapidly by using accurately measuring in real time the resolution of the nanoscale.