ELECTROCHEMICAL DEPOSITION OF TANTALUM AND/OR COPPER IN IONIC LIQUIDS

摘要

The invention relates to a method for electrochemical deposition of tantalum and/or copper on a substrate in an ionic liquid, containing at least one tetraalkylammonium-, tetraalkylphosphonium-, 1,1-dialkylpyrrolidinium-, 1-hydroxyalkyl-1-alkylpyrrolidinium-, 1-hydroxyalkyl-3-alkylimidazolium-or bis(1-hydroxyalkyl)imidazolium cation, whereby the alkyl groups or the alkylene chains of the 1-hydroxyalkyl groups can independently have 1 to 10 C atoms.