HONEYCOMBED LARGE AREA LAB6 PLASMA DC SOURCE WITH CRACK-RESISTANT SUPPORTING

摘要

A honeycomb-type DC plasma source is provided to increase the size of a plasma panel by using a lanthanum hexa-boride(LaB6) electrode for minimizing a thermal stress applied on the plasma panel. A honeycomb-type DC plasma source includes small-sized lanthanum hexa-boride electrodes(9) arranged on a support structure in a honeycomb shape. Plasma with high-density and large-size is generated by the lanthanum hexa-boride electrode. A space(11) is formed between the lanthanum hexa-boride electrode and the support structure(10), such that a thermal stress, which is applied on the lanthanum hexa-boride electrode, is minimized. Heaters are selectively arranged on the respective lanthanum hexa-borides such that the spatial distribution of a plasma gas is easily regulated.