SEAL MEMBER, DEPRESSURIZED CHAMBER, DEPRESSURIZING PROCESSING APPARATUS, SEAL MECHANISM OF DEPRESSURIZED CHAMBER, AND METHOD OF MANUFACTURING A DEPRESSURIZED CHAMBER

摘要

A seal member, a pressure reducing vessel, a pressure reducing device, a seal device thereof, and a manufacturing method of the pressure reducing vessel are provided to improve airtightness favorably by using a seal member with favorable edge sealing performance to seal an edge portion without bending the seal member under 90 degrees. A seal member sealing a combined portion of a pressure reducing vessel formed by combining plural plate materials, from an inside thereof includes a loop-formed unit(80b) and a straight-formed unit. The loop-formed is formed around an edge portion of the pressure reducing vessel and pressure-contacted with an inner wall surface of the plural plate materials forming the edge portion, to seal a circumference of the edge portion. The straight-formed unit seals the combined portion formed straightly. The straight-formed unit is connected with the loop-formed unit around the edge portion of the pressure reducing vessel in a sealed condition. The pressure reducing vessel includes a straight-formed unit pressing unit, a supporting block(91), and an edge portion pressing unit(92) additionally. The straight-formed unit pressing unit fixes the straight-formed unit of the seal member. The supporting block is fixed to the edge portion of the seal member and formed with a supporting surface(92a) supporting the loop-formed unit of the seal member. The edge portion pressing unit is contacted with the plate material forming the edge portion of the pressure reducing vessel to fix the loop-formed unit between the supporting surfaces of the supporting block.