Thin film deposition device and method for fabricating thin film deposition ussing the same

摘要

The present invention is the organic light in a vacuum printing device, one of the production apparatus for producing an organic electroluminescent device relates to the purification unit such that moisture or oxygen circulation to adversely affect the light emitting element in each sustain 1vppm below the film forming apparatus and film forming method using them to improve the life of the organic electroluminescent device is attached to the vacuum printing device. ; film-forming method using the film forming apparatus of the present invention, and this chamber including a chuck for mounting a substrate; A vacuum pump connected to a predetermined portion of the chamber; There is a technical feature, and the deposition method using the film forming apparatus, and it includes a cycle consisting of the purification unit is connected to a predetermined portion of the chamber. ; Therefore, the film formation method using the film forming apparatus of the present invention, and it is an organic electroluminescent By controlling the atmosphere in the light-emitting device manufacturing apparatus, one of the vacuum printing machine, by producing a moisture-absorbing material in the organic light absorption capacity in a state that can be used to the maximum light-emitting element, there is an effect of improving the life of the organic electroluminescent device.