Lithographic Projection Apparatus with Collector including Concave and Convex Mirrors

摘要

The lithographic projection apparatus of the present invention , in order to obtain a converging beam of EUV radiation , first with the concave surface a collector having a second reflector in the reflector and a convex surface and a EUV source having . These surfaces are used to mount the mirror . This means that in the downstream of the collector mirror may be omitted .