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Lithographic projection apparatus with collector including concave and convex mirrors
Lithographic projection apparatus with collector including concave and convex mirrors
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机译:具有具有凹面镜和凸面镜的收集器的光刻投影设备
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摘要
An optical system includes a radiation source and at least one collector located in the vicinity of the radiation source. The collector is arranged to collect the radiation to provide a beam of radiation. The at least one collector includes a first reflector on a concave surface and a second reflector on a convex surface, the concave surface surrounding the convex surface.
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