SOLID ELECTROLYTE THIN FILM FABRICATED BY EB-PVD AND METHOD THEREOF

摘要

The present invention relates to a solid electrolyte thin film and a method of manufacturing the same. The present invention uses the electron beam physical vapor deposition method to produce a dense solid electrolyte thin film having a columnar structure at a high deposition rate. The solid electrolyte thin film according to the present invention has not only a very fine microstructure but also an orientation of the columnar structure, and exhibits high conductivity at low temperature, so that the electrolyte, gas separation membrane, gas sensor, and other electrolytic electrolytes of a solid oxide fuel cell can be obtained. It can be used as.;Electron beam physical vapor deposition, solid electrolyte, solid oxide fuel cell, gas separation membrane, gas sensor