首页> 外国专利> Optical Path rotating device, A Semiconductor Laser Apparatus include Above Optical Path rotating device And Above Optical Path rotating device Making Method

Optical Path rotating device, A Semiconductor Laser Apparatus include Above Optical Path rotating device And Above Optical Path rotating device Making Method

机译:光路旋转装置,半导体激光装置包括上述光路旋转装置和上述光路旋转装置的制造方法

摘要

An optical path rotating device, a semiconductor laser apparatus including the same, and a method for manufacturing the same are provided to enhance optical efficiency and minimize the number of optical components by using a micro-machining process. A method for manufacturing an optical path rotating device(300) includes a process for forming a jig including a plurality of grooves having at least one inclined side arranged in one direction. The method further includes a process for positioning one side of a dove prism on the inclined side. The method further includes a process for depositing a mask layer on a substrate having a predetermined gradient to an upper surface, a process for removing a part of the mask layer, a process for forming the inclined side, and a process for positioning one side of the dove prism on the inclined side.
机译:提供一种光路旋转装置,包括该光路旋转装置的半导体激光装置及其制造方法,以通过使用微加工工艺来提高光学效率并最小化光学部件的数量。一种用于制造光路旋转装置(300)的方法,包括形成夹具的过程,该夹具包括具有在一个方向上布置的至少一个倾斜侧的多个凹槽。该方法还包括将道威棱镜的一侧定位在倾斜侧的过程。该方法还包括以下步骤:在具有相对于上表面的预定梯度的基板上沉积掩模层的步骤,去除掩模层的一部分的步骤,形成倾斜面的步骤以及将衬底的一侧定位的步骤。鸽子棱镜在倾斜的一侧。

著录项

  • 公开/公告号KR100717853B1

    专利类型

  • 公开/公告日2007-05-14

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20050045820

  • 发明设计人 하종민;김상천;김선호;

    申请日2005-05-30

  • 分类号H01S3/10;

  • 国家 KR

  • 入库时间 2022-08-21 20:32:14

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