首页> 外国专利> Nozzle for Injecting Sublimable Solid Particles Entrained in Gas for Cleaning Surface and Method for Cleaning Surface using the Nozzle

Nozzle for Injecting Sublimable Solid Particles Entrained in Gas for Cleaning Surface and Method for Cleaning Surface using the Nozzle

机译:喷射夹带在气体中的可升华固体颗粒的喷嘴,用于清洁表面以及使用该喷嘴清洁表面的方法

摘要

The invention comprises a that, the cleaning medium flowing from the cleaning medium source sublimate solid particles of the sublimable solid particles min using a nozzle that can prevent the frost caused by the cryogenic snow from the surface of the water nozzle and the object to be cleaned the cleaning medium to block the change in snow conditions that; A nozzle block for injecting the cleaning medium from the cleaning medium flowing snow block is grown by the adiabatic expansion to avoid cleaning the surface of the water; Carrier gas mixing block and the cleaning snow to the medium supplied to the nozzle block to the carrier gas flowing from the carrier gas source; And a configuration including at least a heater for heating a portion of the carrier gas supplied from carrier gas supply source. Also, after the present invention is an equipment configuration for supply is that the line that is, CO 2 storage tank, dry ice particles that is created by the pressure of the flow control valve via a solenoid valve at a portion the liquid CO 2 to the nozzle flows into the injection nozzle N 2 carrier gas is mixed with air or purified form the structure being injected. The present invention is the injection of dry ice at the time the configuration automation equipment by mounting the additional thermocouple sensor at the outlet side end portion of the can automatically control the supply of the CO 2 through the installation of the solenoid valve, and also blocks the carrier gas or the nozzle block nozzle you can confirm the presence or absence. ; Cleaning the nozzle, the venturi, adiabatic expansion, sublimation, solid particles, CO2, snow, the carrier
机译:本发明的特征在于,从清洗介质源流出的清洗介质使用能够防止从喷嘴表面和被清洗物的表面由低温雪引起的结霜的喷嘴升华可升华固体颗粒中的固体颗粒min。清洁介质阻止雪况的变化;通过绝热膨胀来生长用于从清洁介质流动的雪块中注入清洁介质的喷嘴块,从而避免清洁水表面。载气混合块和清洁雪将供给到喷嘴块的介质提供给从载气源流出的载气;一种配置,至少包括加热器,该加热器用于加热从载气供应源供应的一部分载气。另外,在本发明的用于供给的设备配置之后,即CO 2 储罐管线中,干冰颗粒是由流量控制阀的压力经由电磁阀在流入喷嘴的液态CO 2 的一部分流入喷嘴N 2 的载气与空气混合或从被注入的结构中净化。本发明是在配置自动化设备时通过将附加的热电偶传感器安装在罐的出口侧端部处来注入干冰的,该自动热电偶传感器的安装通过安装自动控制CO 2 的供应。电磁阀,并阻塞载气或喷嘴阻塞喷嘴,您可以确认是否存在。 ;清洁喷嘴,文丘里管,绝热膨胀,升华,固体颗粒,CO2,雪,载体

著录项

  • 公开/公告号KR100725242B1

    专利类型

  • 公开/公告日2007-06-04

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20040114260

  • 发明设计人 윤철남;

    申请日2004-12-28

  • 分类号H01L21/304;

  • 国家 KR

  • 入库时间 2022-08-21 20:32:05

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