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APPARATUS FOR PLASMA FORMING INNER MAGNETIC BUCKET TO CONTROL A VOLUME OF A PLASMA
APPARATUS FOR PLASMA FORMING INNER MAGNETIC BUCKET TO CONTROL A VOLUME OF A PLASMA
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机译:等离子体形成内磁桶控制等离子体体积的装置
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摘要
A plasma confinement arrangement for controlling the volume of a plasma while processing a substrate inside a process chamber includes a chamber within which a plasma is both ignited and sustained for processing. The chamber is defined at least in part by a wall and further includes a plasma confinement arrangement. The plasma confinement arrangement includes a magnetic array disposed inside of the chamber. The magnetic array has a plurality of magnetic elements that are disposed around a plasma region within the process chamber.
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