Method and measuring arrangement for measuring the per unit of volume region of a vacuum in a given the direction of the electrical charge quantity flowing through and their use for a mass spectrometer

摘要

A method for measuring the per unit of volume region of a vacuum in a given the direction of the electrical charge quantity flowing through, in the case of the charge transporting particles by means of a with a measuring circuit is connected for a galvanic current collecting device arrangement (1, 10) and be absorbed by the catching of the galvanic current in the measuring circuit is measured, characterized in that the catching of the particles in said direction along at least two surfaces and cascaded is carried out simultaneously, wherein, in each of the particles cascading stage along a direction transverse to the given the direction of the lying surface to be collected.