A method for determining the absolute thickness of not transparent and transparent samples by means of a confocal measurement technology

摘要

The invention relates to a method for determining the absolute spatially resolved double-sided topography and thickness of samples by means of two oppositely disposed a confocal microscopes. In this case, after calibration of the appliance from both sides of the sample the topography is measured, the calibration plane are summed and subtracted. Furthermore, the invention relates to a device for carrying out the method.