Spreading diffused microwave plasma producing method, involves providing plasma ignited by resonant ignition structure with energy over surrounding microwave field such that spreading diffused plasma is produced

摘要

The method involves causing a plasma ignition, in which a resonance circuit is dimensioned and arranged in such a manner that high resonance field intensity is attained with a lower power coupling for the plasma ignition to inherently protect an ignition device. The plasma ignited by a resonant ignition structure (3) is provided with energy over a surrounding microwave field such that spreading diffused plasma is produced. An independent claim is also included for a device for producing spreading diffused microwave plasma.