Micromechanical scanning sensor, especially for raster force microscope, has sensor unit with base consisting of first material connected to sensor arm and functional part consisting of second material joined to base

摘要

The sensor (10) has a holder (11) and a sensor arm (12) in the form of a flexible beam connected to the holder at a first end (12a) and a sensing unit (13) connected to the second end (12b). The sensor unit has a base consisting of a first material connected to the sensor arm and a functional part of a second material joined to the base.