Flow sensor unit cleaning method, involves arranging temperature measuring unit and heat unit on carrier unit, and heating temperature measuring unit with additional platinum thin-film resistor

摘要

The method involves arranging a temperature measuring unit (2) and a heat unit (3) on a carrier unit, where the temperature measuring unit exhibits a platinum thin-film resistor on a ceramic subsurface. The temperature measuring unit is heated with an additional platinum thin-film resistor. The carrier unit is laminated by ceramic foils (1a, 1b, 1c), and the temperature measuring unit and the heat unit are electrically contacted with contact surfaces by electrical conductors : Independent claims are also included for the following: (1) a flow sensor unit comprising two platinum thin-film resistors (2) a method for manufacturing a flow sensor unit.