Test device and method for detecting cracks on semiconductor substrates have unit to locally heat different parts of the substrate and pyrometer to measure local temperature and detect differences

摘要

A test device (1) for detecting cracks on semiconductor substrates comprises a holder (2) for at least one substrate (7), a test device and a unit to move the substrate with respect to the test device. The test unit comprises at least one heat source (4) to locally heat the substrate and at least one pyrometer with a detector (5) to measure the local temperature of the substrate. An independent claim is also included for a method for the above in which the temperature is measured at two different points and the temperature difference compared with a threshold value, a crack being indicated if this value is exceeded.