FIRST DETECTING SHEET AND FIRST THERMOMETRIC SYSTEM FOR DETECTING AND MEASURING TEMPERATURE OF AN OBJECT UNDER TEST, SECOND DETECTING SHEET AND SECOND THERMOMETRIC SYSTEM FOR DETECTING AND MEASURING TEMPERATURE OF A DUMMY SUBSTRATE, AND HEAT TREATMENT APPARATUS USING SAME

摘要

A first detecting sheet and a first thermometric system for detecting and measuring temperature of an object under test, a second detecting sheet and a second thermometric system for detecting and measuring temperature of a dummy substrate, and a heat treatment apparatus using same are provided to measure the temperature of the object under test in a contacting state between the first detecting sheet and the object under test. A first thermometric system for measuring temperature of an object under test includes a first detecting sheet(1) and a first measuring unit(5). The first detecting sheet is formed by installing a quartz vibrator(13) on a first sheet of a resin material. The first measuring unit measures the temperature on the basis of a frequency corresponding to a proper frequency. The first thermometric system measures the temperature of the object under test in a contacting state between the first detecting sheet and the object under test.